| Squareness measurement LS 127SQ |
The LS 127ST straightness set can be
changed into the squareness set by adding mirror beambender LS
127.4, cube corner reflector LS 127.5 and penta reflector LS
127.6. The axis of mirror reflector LS 127.3 is bent by the
pentareflector precisely to 90°. Measurement of squareness is
based on the measurement of straightness in both arms.
|
Configuration
| Mirror beambender | LS 127.4 | |
| Corner reflector | LS 127.5 | |
| Penta reflector | LS 127.6 | |
| Holder | LS 127.7 | |
| Holder | LS 127.8 | |
| Software | LS 127.11 |
| Technical Specification |
Longitudinal range |
1.5 m (or according to requirements) | |
| Measurement Accuracy | ( 0,005 X ± 0,5 ± 5L ±
M2 ) µm X - measured deviation in µm L - measured distance in m (axis 1) M - measured distance in m (axis 2) |